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ATC Series Thermal Mass Flow Controller

Series Description

  • ※Flow controller with Total flow meter
  • ※Maximum control volume:50.0 LPM
  • ※Control Accuracy: ±2.0% of F.S.
  • ※Multi setting method: Digital or Analog or Communication


Product type
product picture
  • Product number Features Description Detailed specifications
Thermal Mass Flow Controller
  • ATC-□□系列 Maximum control volume:50.0LPM、 RS-485(Optional) View specs